De Wolf, PeterPeterDe WolfClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstSnauwaert, J.J.SnauwaertHellemans, L.L.Hellemans2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/601One and two-dimensional carrier profiling in semiconductors by nano-SRPProceedings paper