High-yield parallel transfer print integration of III-V substrate-illuminated C-band photodiodes on silicon photonic integrated circuits

Muliuk, GrigorijGrigorijMuliukZhang, JingJingZhangGoyvaerts, JeroenJeroenGoyvaertsKumari, SulakshnaSulakshnaKumariCorbett, BrianBrianCorbettVan Thourhout, DriesDriesVan ThourhoutRoelkens, GuntherGuntherRoelkens2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33636High-yield parallel transfer print integration of III-V substrate-illuminated C-band photodiodes on silicon photonic integrated circuitsProceedings paperhttps://doi.org/10.1117/12.2507373