Optimization of microvia-technology using an excimer laser for application in microelectronics

Manirambona, BonifaceBonifaceManirambonaDe Baets, JohanJohanDe BaetsVervaet, AlfonsAlfonsVervaet2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7857Optimization of microvia-technology using an excimer laser for application in microelectronicsOral presentation