Verhaegen, KatarinaKatarinaVerhaegenBaert, KrisKrisBaertSimaels, J.J.Simaelsvan Driessche, W.W.van Driessche2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4911A high-throughput silicon microphysiometerJournal article