Mertens, PaulPaulMertensTeerlinck, IvoIvoTeerlinckHurd, TraceTraceHurdKenis, KarineKarineKenisSchmidt, HaraldHaraldSchmidtRotondaro, AntonioAntonioRotondaroHall, L.L.HallGräf, D.D.GräfDe Pestel, FreddyFreddyDe PestelMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/759How clean is clean enough?Proceedings paper