Vandervorst, WilfriedWilfriedVandervorstConard, ThierryThierryConardDe Witte, HildeHildeDe WitteCooke, G. A.G. A.Cooke2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3963Energy and angular dependent profiling of thin (0.5 - 2.5 nm) oxide layersOral presentation