Microstructure simulation of grain growth in Cu Through Silicon Via using phase-field modeling

Nabiollahi, NabiNabiNabiollahiMoelans, NeleNeleMoelansGonzalez, MarioMarioGonzalezDe Messemaeker, JokeJokeDe MessemaekerWilson, ChrisChrisWilsonCroes, KristofKristofCroesBeyne, EricEricBeyneDe Wolf, IngridIngridDe Wolf2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24295Microstructure simulation of grain growth in Cu Through Silicon Via using phase-field modelingProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6813848&contentType=Conference+Publications