Inoue, KojiKojiInoueKambham, Ajay KumarAjay KumarKambhamMangelinck, DominiqueDominiqueMangelinckLawrence, DanDanLawrenceKelly, Thomas F.Thomas F.Kelly2021-10-202021-10-2020121551-9295https://imec-publications.be/handle/20.500.12860/20849Atom-probe-tomographic studies on silicon-based semiconductor devicesJournal article