Witt, ChristianChristianWittYeap, K.B.K.B.YeapLesniewska, AlicjaAlicjaLesniewskaWan, DannyDannyWanJourdan, NicolasNicolasJourdanCiofi, IvanIvanCiofiWu, ChenChenWuTokei, ZsoltZsoltTokei2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/32277Testing the limits of TaN barrier scalingMeeting abstracthttps://ieeexplore.ieee.org/document/8430289/