The influence of geometrical non-idealities in surface micro fabricated MEMS test structures on the extracted Young's modulus using analytical expressions assuming ideal boundary conditions

Van Barel, GregGregVan BarelWitvrouw, AnnAnnWitvrouw2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13013The influence of geometrical non-idealities in surface micro fabricated MEMS test structures on the extracted Young's modulus using analytical expressions assuming ideal boundary conditionsMeeting abstract