Bogaerts, WimWimBogaertsDumon, PieterPieterDumonSelvaraja, ShankarShankarSelvarajaVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15013Silicon nanophotonic waveguide componentsProceedings paper