Boher, P.P.BoherEvrard, P.P.EvrardDefranoux, C.C.DefranouxFouere, J.C.J.C.FouereBellandi, E.E.BellandiBender, HugoHugoBender2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7240High-k dielectric characterization by VUV spectroscopic ellipsometry and X-ray reflectionProceedings paper