3D imaging of atom probe tip shapes with atomic force microscopy

Fleischmann, ClaudiaClaudiaFleischmannParedis, KristofKristofParedisMelkonyan, DavitDavitMelkonyanOp de Beeck, JonathanJonathanOp de BeeckBogdanowicz, JanuszJanuszBogdanowiczMorris, RichardRichardMorrisCuduvally, RamyaRamyaCuduvallyVandervorst, WilfriedWilfriedVandervorst2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/307113D imaging of atom probe tip shapes with atomic force microscopyMeeting abstract