Haralson, ErikErikHaralsonSibaja-Hernandez, ArturoArturoSibaja-HernandezXu, MingweiMingweiXuMalm, GunnarGunnarMalmRadamson, HenryHenryRadamsonÖstling, MikaelMikaelÖstling2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8994HRXRD analysis of SiGeC layers for BiCMOS applicationsProceedings paper