Engineering of an insulating buffer and use of AIN interlayers: two optimisations for AlGaN-GaN HEMT-like structures

Bougrioua, Z.Z.BougriouaMoerman, IngridIngridMoermanNistor, L.L.NistorMonroy, E.E.MonroyCalle, F.F.Calle2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6062Engineering of an insulating buffer and use of AIN interlayers: two optimisations for AlGaN-GaN HEMT-like structuresMeeting abstract