Schram, TomTomSchramBeckx, StephanStephanBeckxDe Gendt, StefanStefanDe GendtVertommen, JohanJohanVertommenLee, S.S.Lee2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8122Integrating high-k dielectrics: etched polysilicon or metal gates?Journal article