Fabrication challenges in integrating self-assembled block copolymer process in semiconductor devices

Seema Saseendran, SandeepSandeepSeema SaseendranPaneri, AbhilashAbhilashPaneriTobback, BertBertTobbackKutrzeba Kotowska, BogumilaBogumilaKutrzeba KotowskaVecchio, EmmaEmmaVecchioJamieson, GeraldineGeraldineJamiesonParaschiv, VasileVasileParaschivFigeys, BrunoBrunoFigeysSuh, Hyo SeonHyo SeonSuhSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanTakahashi, KoheiKoheiTakahashiFujikane, MasakiMasakiFujikaneHimeno, AtsushiAtsushiHimenoNakamura, KunihikoKunihikoNakamuraTambo, NaokiNaokiTamboNakata, YukiYukiNakataTanaka, HiroyukiHiroyukiTanakaNaito, YasuyukiYasuyukiNaito2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/35919Fabrication challenges in integrating self-assembled block copolymer process in semiconductor devicesProceedings paperhttps://confit.atlas.jp/guide/event/ssdm2020/subject/C-2-05/advanced