Goethals, MiekeMiekeGoethalsJonckheere, RikRikJonckheereVan Roey, F.F.Van RoeyHermans, J.J.HermansEliat, AstridAstridEliatRonse, KurtKurtRonseWong, P.P.WongZandbergen, P.P.ZandbergenVasconi, M.M.VasconiSevergnini, E.E.SevergniniHenke, W.W.HenkeHohle, C.C.HohleHenry, D.D.HenryThony, P.P.ThonyMarkey, L.L.MarkeySchiavone, P.P.SchiavoneFuard, D.D.Fuard2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6362UV2Litho: usable vacuum ultra violet lithographyOral presentation