Structural characterization of mesoporous organosilica films for ultralow-k dielectrics

de Theije, F.K.F.K.de TheijeBalkenende, A.R.A.R.BalkenendeVerheyen, M.A.M.A.VerheyenBaklanov, MikhaïlMikhaïlBaklanovMoguilnikov, KonstantinKonstantinMoguilnikovFurukawa, Y.Y.Furukawa2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7449Structural characterization of mesoporous organosilica films for ultralow-k dielectricsJournal article