Study of GeSn strain relaxation and thermal stability in view of strain relaxed buffer layer applications

Wang, WeiWeiWangLoo, RogerRogerLooShimura, YosukeYosukeShimuraVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-222014-11https://imec-publications.be/handle/20.500.12860/24805Study of GeSn strain relaxation and thermal stability in view of strain relaxed buffer layer applicationsMeeting abstract