Effect of diamond nucleation process on propagation losses of AlN/diamond SAW filter

Elmazria, O.O.ElmazriaEl Hakiki, M.M.El HakikiMortet, V.V.MortetAssouar, B.M.B.M.AssouarNesladek, MilosMilosNesladekVanecek, M.M.VanecekBergonzo, P.P.BergonzoAlnot, P.P.Alnot2021-10-152021-10-152004-11https://imec-publications.be/handle/20.500.12860/8877Effect of diamond nucleation process on propagation losses of AlN/diamond SAW filterJournal article