Huyghebaert, CedricCedricHuyghebaertConard, ThierryThierryConardBrijs, BertBertBrijsVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7670Influence of the Ge concentration in a SiGe matrix on ionisation probability and sputter yield with O2+ beamMeeting abstract