Alvarez, DavidDavidAlvarezHartwich, J.J.HartwichKretz, J.J.KretzFouchier, MarcMarcFouchierVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7133Scanning spreading resistance microscopy of fully depleted silicon-on-insulator devicesJournal article