Observation of negative mask error enhancement factor due to mask transmission resonance

Philipsen, VickyVickyPhilipsenDe Bisschop, PeterPeterDe BisschopMesuda, KeiKeiMesuda2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14315Observation of negative mask error enhancement factor due to mask transmission resonanceJournal article