Gupta, MihirMihirGuptaVerstraete, LanderLanderVerstraeteFranke, Joern-HolgerJoern-HolgerFrankeKundu, AchintyaAchintyaKunduFallica, RobertoRobertoFallicaRonse, KurtKurtRonseGallagher, EmilyEmilyGallagherDe Simone, DaniloDaniloDe SimonePhilipsen, VickyVickyPhilipsenSuh, Hyo SeonHyo SeonSuh2025-07-072025-05-112025-07-072024978-1-5106-8155-20277-786XWOS:001467876500019https://imec-publications.be/handle/20.500.12860/45641EUV dose reduction for pitch 28 nm line-spaceProceedings paper10.1117/12.3034646978-1-5106-8156-9WOS:001467876500019