Yu, Hong-YuHong-YuYuChang, Shou-ZenShou-ZenChangAoulaiche, MarcMarcAoulaicheWang, Xin PengXin PengWangAdelmann, ChristophChristophAdelmannKaczer, BenBenKaczerAbsil, PhilippePhilippeAbsilLauwers, AnneAnneLauwersBiesemans, SergeSergeBiesemans2021-10-172021-10-1720080003-6951https://imec-publications.be/handle/20.500.12860/14827Transistor threshold voltage modulation by Dy2O3 rare-earth oxide capping: The role of bulk dielectrics chargeJournal articlehttp://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=APPLAB000093000026263502000001&idtype=cvips&gifs=Yes