Electrochemical, physical, and electrical characterization of two clean solutions for Cu PCMP clean

Li, YunlongYunlongLiHeylen, NancyNancyHeylenDaviot, JeromeJeromeDaviotReid, ChrisChrisReidLeunissen, PeterPeterLeunissen2021-10-202021-10-202012-041662-9779https://imec-publications.be/handle/20.500.12860/21020Electrochemical, physical, and electrical characterization of two clean solutions for Cu PCMP cleanJournal articlewww.scientific.net/SSP.187.235