Neuber, ChristianChristianNeuberRingk, AndreasAndreasRingkKolb, TristanTristanKolbWieberger, FloryanFloryanWiebergerStrohriegl, PeterPeterStrohrieglSchimdt, Hans-WernerHans-WernerSchimdtFokkema, VincentVincentFokkemaCooke, MikeMikeCookeRawlings, ColinColinRawlingsDurig, UrsUrsDurigKnoll, ArminArminKnollde Marneffe, Jean-FrancoisJean-Francoisde MarneffeDe Schepper, PeterPeterDe SchepperKaestner, MarcusMarcusKaestnerKrivoshapkina, YanaYanaKrivoshapkinaBudden, MatthiasMatthiasBuddenRangelow, IvoIvoRangelow2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24317Molecular glass resists for scanning probe lithographyProceedings paperhttp://spie.org/app/submissions/Coauthors.aspx?RoleGuid=cc442354-711c-e311-a6ea-005056814748