F atoms interaction with nanoporous OSG low-k materials

Rakhimova, T.T.RakhimovaRakhimov, A.A.RakhimovZyryanov, S.S.ZyryanovLopaev, D.D.LopaevMankelevich, Y.Y.MankelevichProshina, O.O.ProshinaNovikova, N.N.NovikovaKurchikov, K.K.KurchikovBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24417F atoms interaction with nanoporous OSG low-k materialsMeeting abstract