Evaluation of electron irradiated embedded SiGe source/drain diodes by Raman spectroscopy

Oyhama, HidenoriHidenoriOyhamaNaka, N.N.NakaTakakura, K.K.TakakuraTsunoda, I.I.TsunodaLondos, C.AC.ALondosBargallo Gonzalez, MireiaMireiaBargallo GonzalezSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17753Evaluation of electron irradiated embedded SiGe source/drain diodes by Raman spectroscopyMeeting abstract