Fabrication of conductive AFM probes and their use in microelectronics

Fouchier, MarcMarcFouchierAlvarez, DavidDavidAlvarezEyben, PierrePierreEybenDuhayon, NatasjaNatasjaDuhayonPetry, JasmineJasminePetryDrijbooms, ChrisChrisDrijbooms2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7574Fabrication of conductive AFM probes and their use in microelectronicsOral presentation