Investigation of semi-vertical GaN FET structures function using EBIC method

Satka, AlexanderAlexanderSatkaPriesol, JurajJurajPriesolYou, ShuzhenShuzhenYouGeens, KarenKarenGeensDecoutere, StefaanStefaanDecoutere2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/35904Investigation of semi-vertical GaN FET structures function using EBIC methodProceedings paper