Integration of semiconductor nanowires in silicon CMOS technology: compatibility study

Vereecken, PhilippePhilippeVereeckenBjörk, MichaelMichaelBjörkBrongersma, SywertSywertBrongersmaIacopi, FrancescaFrancescaIacopiRiel, HeikeHeikeRielRiess, WalterWalterRiessVan den Bosch, GeertGeertVan den BoschVijayraghavan, RaghavanRaghavanVijayraghavan2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13171Integration of semiconductor nanowires in silicon CMOS technology: compatibility studyOral presentation