Electrothermal theory of photomodulated optical reflectance on active doping profiles in silicon

Bogdanowicz, JanuszJanuszBogdanowiczDortu, FabianFabianDortuClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstSalnik, AlexAlexSalnik2021-10-182021-10-1820100021-8979https://imec-publications.be/handle/20.500.12860/16772Electrothermal theory of photomodulated optical reflectance on active doping profiles in siliconJournal article