Line profile measurement of advanced-FinFET features by reference metrology

Takamasu, KiyoshiKiyoshiTakamasuIwaki, Y.Y.IwakiTakahashi, S.S.TakahashiKawada, H.H.KawadaIkota, M.M.IkotaYamaguchu, A.A.YamaguchuLorusso, GianGianLorussoHoriguchi, NaotoNaotoHoriguchi2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25979Line profile measurement of advanced-FinFET features by reference metrologyProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2210945&resultClick=1