De Messemaeker, JoJoDe MessemaekerSinapi, FabriceFabriceSinapiOng, PatrickPatrickOngPut, StijnStijnPutNelis, DanielDanielNelisVan den bosch, JeroenJeroenVan den boschStrauven, YvanYvanStrauvenLippens, PaulPaulLippensDevriendt, KatiaKatiaDevriendt2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11958Impact of ceria properties and CMP parameters on STI CMP performanceProceedings paperhttp://www.nanograin.umicore.com/show_LakePlacid2007.pdf