A DC-pulsed capacitively-coupled planar Langmuir probe for plasma process diagnostics and monitoring

Samara, VladimirVladimirSamaraBooth, Jean-PaulJean-PaulBoothde Marneffe, Jean-FrancoisJean-Francoisde MarneffeMilenin, AlexeyAlexeyMileninBrouri, MohandMohandBrouriBoullart, WernerWernerBoullart2021-10-202021-10-2020120963-0252https://imec-publications.be/handle/20.500.12860/21450A DC-pulsed capacitively-coupled planar Langmuir probe for plasma process diagnostics and monitoringJournal articlehttp://iopscience.iop.org/0963-0252/21/6/065004/