Van Elshocht, SvenSvenVan ElshochtAdelmann, ChristophChristophAdelmannPopovici, Mihaela IoanaMihaela IoanaPopoviciSwerts, JohanJohanSwertsDelabie, AnneliesAnneliesDelabieNyns, LauraLauraNynsShi, XiaopingXiaopingShiTielens, HildeHildeTielensPourtois, GeoffreyGeoffreyPourtoisSchram, TomTomSchramPierreux, DieterDieterPierreuxMaes, JanJanMaesHardy, AnAnHardyVan Bael, MarliesMarliesVan BaelKittl, JorgeJorgeKittl2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18176Rare earth materials for semiconductor applicationsMeeting abstract