Emitter shape evolution during field evaporation and its impact on the reconstructed data of SiGe fins embedded in SiO2

Melkonyan, DavitDavitMelkonyanArnoldi, LaurentLaurentArnoldiFleischmann, ClaudiaClaudiaFleischmannKumar, ArulArulKumarVurpillot, FrancoisFrancoisVurpillotBogdanowicz, JanuszJanuszBogdanowiczVandervorst, WilfriedWilfriedVandervorst2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26990Emitter shape evolution during field evaporation and its impact on the reconstructed data of SiGe fins embedded in SiO2Meeting abstract