Copper deposition and subsequent grain structure evolution in narrow lines

Brongersma, SywertSywertBrongersmaD'Haen, JanJanD'HaenVanstreels, KrisKrisVanstreelsDe Ceuninck, WardWardDe CeuninckVervoort, IwanIwanVervoortMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7261Copper deposition and subsequent grain structure evolution in narrow linesJournal article