Numerical investigation of HBr/He transformer coupled plasmas used for silicon etching

Gul, BanatBanatGulTinck, StefanStefanTinckDe Schepper, PeterPeterDe SchepperRehman, Aman-urAman-urRehman2021-10-222021-10-2220150022-3727https://imec-publications.be/handle/20.500.12860/25345Numerical investigation of HBr/He transformer coupled plasmas used for silicon etchingJournal articlehttp://iopscience.iop.org/0022-3727/48/2/025202/