Kondoh, EiichiEiichiKondohBaklanov, MikhaïlMikhaïlBaklanovBender, HugoHugoBenderMaex, KarenKarenMaex2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2674Structural change in porous silica thin film after plasma treatmentJournal article