Leys, FrederikFrederikLeysBonzom, RenaudRenaudBonzomLoo, RogerRogerLooRichard, OlivierOlivierRichardDe Jaeger, BriceBriceDe JaegerVan Steenbergen, JanJanVan SteenbergenDessein, KristofKristofDesseinConard, ThierryThierryConardRip, JensJensRipBender, HugoHugoBenderVandervorst, WilfriedWilfriedVandervorstMeuris, MarcMarcMeurisCaymax, MattyMattyCaymax2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10778Epitaxy solutions for Ge MOS technologyProceedings paper