van Dorp, DennisDennisvan DorpArnauts, SophiaSophiaArnautsCuypers, DanielDanielCuypersRip, JensJensRipHolsteyns, FrankFrankHolsteynsDe Gendt, StefanStefanDe Gendt2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24687Nanoscale etching and reoxidation of InAsProceedings paperhttp://www.scientific.net/SSP.219.56