Ellipsometric study of the change in the porosity of silica xerogels after chemical modification of the surface with hexamethyldisilazane

Himcinschi, C.C.HimcinschiFriedrich, M.M.FriedrichFrühauf, S.S.FrühaufStreiter, I.I.StreiterSchulz, S.E.S.E.SchulzGessner, T.T.GessnerBaklanov, MikhaïlMikhaïlBaklanovMoguilnikov, KonstantinKonstantinMoguilnikovZahn, D.R.T.D.R.T.Zahn2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6394Ellipsometric study of the change in the porosity of silica xerogels after chemical modification of the surface with hexamethyldisilazaneJournal article