Maes, JanJanMaesBlomberg, T.T.BlombergMatero, R.R.MateroTuominen, M.M.TuominenSwerts, JohanJohanSwertsMenou, NicolasNicolasMenouWang, Xin PengXin PengWangKittl, JorgeJorgeKittlWouters, DirkDirkWouters2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14093Sr-Cp precursor based ALD SrTiO3 for capacitor applicationsProceedings paper