Interpretation of TOF-SIMS depth profiles from ultrashallow high-k dielectric stacks assisted by hybrid collisional computer simulation

Ignatova, V.A.V.A.IgnatovaMöller, W.W.MöllerConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstGijbels, R.R.Gijbels2021-10-162021-10-162005-02https://imec-publications.be/handle/20.500.12860/10632Interpretation of TOF-SIMS depth profiles from ultrashallow high-k dielectric stacks assisted by hybrid collisional computer simulationJournal article