Investigation of chemical mechanical planarization (CMP) and post-CMP cleanig for Molybdenum

Harada, KenKenHaradaPhilipsen, HaroldHaroldPhilipsenTeugels, LieveLieveTeugelsStruyf, HerbertHerbertStruyf2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33098Investigation of chemical mechanical planarization (CMP) and post-CMP cleanig for MolybdenumOral presentation