Supercritical carbon dioxide etching of transition metal (Cu, Ni, Co, Fe) thin films

Rasadujjaman, MdMdRasadujjamanNakamura, YYNakamuraWatanabe, MMWatanabeKondoh, EEKondohBaklanov, MikhaïlMikhaïlBaklanov2021-10-232021-10-2320160167-9317https://imec-publications.be/handle/20.500.12860/27194Supercritical carbon dioxide etching of transition metal (Cu, Ni, Co, Fe) thin filmsJournal articlehttp://www.sciencedirect.com/science/article/pii/S0167931715301192