Radisic, DunjaDunjaRadisicVeloso, AnabelaAnabelaVelosoGupta, AnshulAnshulGuptaHosseini, MaryamMaryamHosseiniWang, ShouhuaShouhuaWangMertens, HansHansMertensChan, BTBTChanBatuk, DmitryDmitryBatukMartinez Alanis, Gerardo TadeoGerardo TadeoMartinez AlanisLazzarino, FredericFredericLazzarinoDentoni Litta, EugenioEugenioDentoni LittaHoriguchi, NaotoNaotoHoriguchi2022-11-292022-09-082022-11-292022978-1-5106-4987-30277-786XWOS:000844514700011https://imec-publications.be/handle/20.500.12860/40367Middle-of-line plasma dry etch challenges for Buried Power Rail integrationProceedings paper10.1117/12.2616731978-1-5106-4988-0WOS:000844514700011